Non-electrostatic diagnostics for ion beams and sputter effects

Abstract

This paper reports on novel non-electrostatic diagnostics for ion beams. A force measuring probe for determination of the momentum flux in a particle beam is presented, and results are compared with corresponding measurements by a calorimetric technique. The target chamber is operated in a pressure regime where charge-exchange collisions are important. It is highlighted that non-electrostatic methods are sensitive for ions as well as energetic neutral atoms. Further, a technique is demonstrated which allows a measurement of the momentum associated with sputtered target atoms and recoil beam particles.