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Effect of heat treatment on structural, optical and mechanical properties of sputtered TiOxNy films

Materials ScienceMaterials EngineeringOptical MaterialsEngineeringMaterial AnalysisMechanical PropertiesOptical PropertiesMechanical EngineeringApplied PhysicsHigh-performance MaterialThin FilmsSputtered Tioxny FilmsHeat TreatmentDepth-graded Multilayer CoatingThin Film Processing