Concepedia

Optical and chemical characterization of thin TiNx films deposited by DC-magnetron sputtering

S. Wrehde, M. Quaas, Robert Bogdanowicz, H. Steffen, H. Wulff, R. Hippler

Vacuum · 2008 · 14 citations · 12 references

DOI

Concepts

References

12

<i>Ellipsometry and Polarized Light</i>

R. M. A. Azzam, N. M. Bashara, Stanley S. Ballard · Physics Today · 1978 · 4.3K citations

, , +13

Ellipsometry and polarized light

R. M. A. Azzam, N. M. Bashara, D. Thorburn Burns · Analytica Chimica Acta · 1987 · 1.7K citations

, , +9

Optical, electronic, and transport properties of nanocrystalline titanium nitride thin films

P. Patsalas, S. Logothetidis · Journal of Applied Physics · 2001 · 308 citations

, , +17

Reactive DC magnetron sputtering of elemental targets in Ar/N2 mixtures: relation between the discharge characteristics and the heat of formation of the corresponding nitrides

R. Mientus, K. Ellmer · Surface and Coatings Technology · 1999 · 98 citations

, , +12

Determination of the optimum TiN coating thickness on WC inserts for machining carbon steels

K. Tuffy, G. Byrne, Denis P. Dowling · Journal of Materials Processing Technology · 2004 · 80 citations

, , +14