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Effects of substrate bias voltage on the microstructure, mechanical properties and tribological behavior of reactive sputtered niobium carbide films

Materials ScienceMaterials EngineeringTribological CoatingEngineeringSuperalloyMechanical PropertiesMechanical EngineeringApplied PhysicsCarbideSubstrate Bias VoltageTribological BehaviorThin FilmsMicrostructure