Influence of substrate and target temperatures on properties of transparent and conductive doped ZnO thin films prepared by r.f. magnetron sputtering - Concepedia

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Influence of substrate and target temperatures on properties of transparent and conductive doped ZnO thin films prepared by r.f. magnetron sputtering

37

Citations

7

References

1989

Year

Tadatsugu Minami, Hirotaka Sato, Tsutomu Sonoda, Hidehito Nanto, S. Takata

Thin Solid Films

Materials ScienceMaterials EngineeringEngineeringOxide ElectronicsApplied PhysicsThin FilmsTarget TemperaturesZno Thin FilmsThin Film Processing

References

	Year	Citations

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