Multiple wavelength heterodyne array interferometry

Abstract

Multiple wavelength interferometry is combined with a heterodyne array sensing technique to provide an approach for measuring highly aberrated optical surfaces. Interferometric measurements created with long effective wavelengths are obtained by digitally combining complex exposures collected at different optical wavelengths. The heterodyne array sensing method is straightforward to implement and holds promise for rapid wavefront measurements with high spatial and phase resolution. Measurements of a tilted, flat surface are presented and analyzed.