Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1986 · 11 citations · 14 references
Natural SciencesMaterials EngineeringMaterials ScienceSurface ChemistrySurface ScienceThin FilmsCoatingsSilicon MaterialsSurface PhysicsThin Film AdhesionThin Film OxidationThin-film MaterialsAdhesion MechanismsFilm AdhesionOxidation EffectsSilicon OxidationSilicon Surface Science
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