Thin Films with Ultra‐low Thermal Expansion

Abstract

Ultra-low coefficient of thermal expansion (CTE) is an elusive property, and narrow temperature ranges of operation and poor mechanical properties limit the use of conventional materials with low CTE. We structured a periodic micro-array of bi-metallic cells to demonstrate ultra-low effective CTE with a wide temperature range. These engineered tunable CTE thin film can be applied to minimize thermal fatigue and failure of optics, semiconductors, biomedical sensors, and solar energy applications.