A non‐contact low‐cost sensor for improved repeatability in co‐evaporated CIGS

Abstract

Abstract A low‐cost, non‐contact sensor that provides endpoint detectionfor each stage in a three‐stage CuIn x Ga 1− x Se 2 (CIGS( deposition is described. CIGS and precursoremissivity data providing the fundamental basis for the sensor's operation are presented. In situ operation of the sensor is outlined and sensor‐predicted film thickness, maximum Cu ratio during growth, as well as final Cu ratio are compared with those derived by other methods. Characteristics of the sensor relevant to automated and continuous processing are discussed. Copyright © 2005 John Wiley & Sons, Ltd.