Versatile three-dimensional cryogenic micropositioning device

Abstract

A simple design for a mechanically driven three-dimensional cryogenic micropositioner is presented. The design is based on a parallelogram structure constructed from leaf springs and wires. Actuation is achieved by the elastic deformation of the parallelogram by screws. Positions within a volume of roughly (2 mm)3 are attainable. The precision and reproducibility of positioning are in the μm-range. The deviations from linearity are smaller than 10% for the whole working range and the deviation from orthogonality is smaller than 3°. Calibration measurements performed on a Cu-mesh with a lattice constant of 60 μm are presented. In an experiment investigating the ballistic transport of carriers in the semimetal Bi, two such devices are used. The first one is used as a scanning unit for an optical fiber and the second one is used as micropositioner for a Cu point contact.