Concepedia

On the angular distribution of sputtered particles

K. T. Waldeer, Herbert M. Urbassek

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1986 · 18 citations · 15 references

DOI

Concepts

References

15

Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets

Peter Sigmund · Physical Review · 1969 · 3.5K citations

, , +13

Sputtering studies with the Monte Carlo Program TRIM.SP

J.P. Biersack, W. Eckstein · Applied Physics A · 1984 · 916 citations

, , +8

Numerical inversion of the laplace transform: a survey and comparison of methods

Brian Davies, Brian Martin · Journal of Computational Physics · 1979 · 673 citations

, , +12

The depth resolution of sputter profiling

H. H. Andersen · Applied Physics A · 1979 · 596 citations

, , +5

Angular Distribution of Sputtered Material

G. K. Wehner, Duane Rosenberg · Journal of Applied Physics · 1960 · 204 citations

, , +13