Japanese Journal of Applied Physics · 1993 · 29 citations · 10 references
Natural SciencesChemical EngineeringChemistryPolymer ChemistryPolymer EngineeringPolymer MaterialsChemical Vapor DepositionEvaporation ProcessesPolymer CharacterizationPolymer Thin FilmsPolymerization KineticsThermogravimetric AnalysisEvaporation From Liquid SurfacesEvaporation RatesTemperature DependenceTemperature Dependence MeasurementTemperature-dependent Reaction RateThermal EvaporationVapor PressureVapor Pressure Estimation
Thermogravimetry (TG) and the Langmuir equation have been employed for the determination of the temperature dependence of the evaporation rate and saturated pressure of monomers used in vapor deposition polymerization (VDP). The measuring process utilizes the evaporation of monomers in vacuum. The ranges of the evaporation rate and saturated pressure of monomers as determined by the TG technique are from 10 -2 to 10 -5 mol/m 2 ·s and from 1 to 10 -3 Pa, respectively. Comparison of the evaporation rate vs temperature relation and the melting point of monomers determines whether the evaporation involves sublimation from a solid surface or evaporation from a liquid surface.
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