Heavy ion damage in silicon and germanium - Concepedia

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Heavy ion damage in silicon and germanium

64

Citations

17

References

1987

Year

L. M. Howe, M.H. Rainville

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

Ion ImplantationEngineeringPhysicsApplied PhysicsHeavy Ion DamageAtomic PhysicsIon EmissionSilicon Debugging

References

	Year	Citations

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