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Publication | Open Access

Capacitive-type chemical sensors using thin silicon/polymer bimorph membranes

DOIFull Paper Access

27

Citations

9

References

2004

Year

S. Chatzandroulis, E. Tegou, D. Goustouridis, Stylianos Polymenakos, D. Tsoukalas
Sensors and Actuators B Chemical

References

YearCitations

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