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Rapid thermal processing of TiN coatings deposited by chemical and physical vapor deposition using a low-energy, high-current electron beam: Microstructural studies and properties

Materials ScienceMaterials EngineeringThermal Spray CoatingEngineeringThermal Barrier CoatingSurface ScienceApplied PhysicsMicrostructural StudiesThin FilmsChemical DepositionTin CoatingsSurface ProcessingChemical Vapor DepositionRapid Thermal Processing