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Effect of nitrogen content and substrate bias on mechanical and corrosion properties of high-entropy films (AlCrSiTiZr)100−xNx

Materials ScienceMaterials EngineeringCorrosion PropertiesEngineeringCorrosionSurface ScienceApplied PhysicsMaterial PerformanceThin FilmsMultiprincipal Element AlloyCorrosion ResistanceHigh-entropy FilmsNitrogen Content