Publication | Closed Access
Evaluation of internal stresses present in chemical vapor deposition diamond films
43
Citations
8
References
1991
Year
Materials ScienceMaterials EngineeringDiamond-like CarbonEngineeringSurface ScienceApplied PhysicsResidual StressInternal StressesThin FilmsChemical DepositionChemical Vapor DepositionThin Film Processing
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