Review of Scientific Instruments · 2010 · 13 citations · 14 references
EngineeringElectrical EngineeringMetrologyOpticsPhotonicsInterferometryLaser OpticsOptical MetrologyFringe AnalysisInterferometric InstrumentationInterferometric MeasurementLaser Distance MeasurementLaser Metrology SystemsLasersOptical Displacement MeasurementOptical Interferometry
We describe a transportable distance measurement system based on synthetic wavelength interferometry. Two frequency-doubled Nd:yttrium aluminum garnet lasers at 532 nm are used to generate a synthetic wavelength of approximately 2.5 cm. A nonpolarizing interferometric system has been set up to eliminate polarization cross-talk issue. A superheterodyne detection was performed to measure the synthetic phase and to determine absolute distances. The capability to achieve fringe interpolation of 2pi/5600 has been demonstrated and an agreement in distance measurement at the 4 microm level has been achieved, compared to an optical interferometric 3 m long displacement bench.
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Recent advances in displacement measuring interferometry
Norman Bobroff · Measurement Science and Technology · 1993 · 428 citations
Engineering, Physics, Metrology +16
Two-wavelength laser interferometry using superheterodyne detection
R. Dändliker, R. Thalmann, D. Prongúê · Optics Letters · 1988 · 243 citations · Full text
C. Polhemus · Applied Optics · 1973 · 223 citations