Concepedia

Publication | Closed Access

Application of SiO2 aerogel film with low dielectric constant to intermetal dielectrics

DOI

41

Citations

5

References

1997

Year

Moon‐Ho Jo, Jung-Kyun Hong, Hyung‐Ho Park, Joong Jung Kim, Sang-Hoon Hyun, S. Y. Choi
Thin Solid Films

References

YearCitations

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