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Microstructural characterization of Ti–C–N thin films prepared by reactive crossed beam pulsed laser deposition

Materials ScienceEngineeringMaterials CharacterizationApplied PhysicsTi–c–n Thin FilmsLaser DepositionThin Film Process TechnologyLaser-assisted DepositionThin FilmsPulsed Laser DepositionMicrostructural CharacterizationThin Film ProcessingMicrostructure