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A novel technique for diamond film deposition using surface wave discharges

Materials ScienceDiamond-like CarbonElectrical EngineeringNovel TechniqueEngineeringMicrofabricationNanoelectronicsGlow DischargeSurface ScienceApplied PhysicsChemical DepositionGas Discharge PlasmaDiamond Film DepositionSurface Wave DischargesChemical Vapor Deposition