Shear Horizontal Acoustic Plate Mode Viscosity Sensor

Abstract

Mode analysis of a LiTaO 3 (LTO) plate has been carried out numerically, and an interference-free shear horizontal acoustic plate mode (SH-APM) suitable for measuring the liquid viscosity was found. A viscosity sensor having a liquid container on the side opposite to interdigital transducers (IDTs) was fabricated on X -cut 148° Y -prop LTO. Satisfactory agreement was obtained between the calculated frequency spectrum and the experimental one. A loading test was carried out for a series of Newtonian liquids, which showed good agreement with the perturbation theory.