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Single-source organometallic chemical vapour deposition process for sulphide thin films: Introduction of a new organometallic precursor BunIn(SPri)2 and preparation of In2S3 thin films

Materials ScienceEngineeringSulphide Thin FilmsSurface ScienceIn2s3 Thin FilmsChemistryThin FilmsDeposition ProcessChemical DepositionChemical Vapor DepositionThin Film Processing