Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2007 · 10 citations · 8 references
Natural SciencesMaterials SciencePhysicsPlasma PhysicsSurface SciencePowder MetallurgyArc DischargesPhysical SputteringPlasma SputteringSputtering ProcessesSurface Sputtering
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