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Microstructure and kinetics of formation of Si2N2O and Si3N4 into Si porous preforms by chemical vapor infiltration (CVI)

Materials EngineeringMaterials ScienceChemical EngineeringMolecular SieveEngineeringMolecular SievingNanoporous MaterialSi Porous PreformsSurface ScienceSiliceneTransport PhenomenaChemistrySilicon On InsulatorChemical Vapor InfiltrationChemical Kinetics