A comparative study on reactive and non-reactive unbalanced magnetron sputter deposition of TiN coatings - Concepedia

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A comparative study on reactive and non-reactive unbalanced magnetron sputter deposition of TiN coatings

207

Citations

19

References

2002

Year

P.H. Mayrhofer, Filip Kunc, J. Musil, Christian Mitterer

Thin Solid Films

Materials ScienceMagnetismMaterials EngineeringEngineeringCorrosionSurface ScienceApplied PhysicsThin FilmsTin CoatingsComparative StudyThin Film ProcessingSurface Processing

References

	Year	Citations

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