Publication | Closed Access
Investigation on optical and microstructural properties of photoluminescent LPCVD SiOxNy thin films
21
Citations
7
References
2001
Year
Materials ScienceMicrostructural PropertiesOptical MaterialsEngineeringOptical PropertiesApplied PhysicsThin FilmsOptoelectronicsChemical Vapor DepositionThin Film Processing
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