Publication | Closed Access
IR spectroscopy and X-ray topography study of annealing of proton bombarded silicon
19
Citations
3
References
1981
Year
Materials ScienceIon ImplantationEngineeringPhysicsX-ray Topography StudyApplied PhysicsAtomic PhysicsSemiconductor Device FabricationSynchrotron RadiationIon EmissionIr SpectroscopySilicon On InsulatorSilicon Debugging
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