A silicon photonic biosensor using phase‐shifted Bragg gratings in slot waveguide

Abstract

We present a novel silicon photonic biosensor using phase-shifted Bragg gratings in a slot waveguide. The optical field is concentrated inside the slot region, leading to efficient light-matter interaction. The Bragg gratings are formed with sidewall corrugations on the outside of the waveguide, and a phase shift is introduced to create a sharp resonant peak within the stop band. We experimentally demonstrate a high sensitivity of 340 nm/RIU measured in salt solutions and a high quality factor of 1.5 × 10⁴, enabling a low intrinsic limit of detection of 3 × 10⁻⁴ RIU. Furthermore, the silicon device was fabricated by a CMOS foundry, facilitating high-volume and low-cost production. Finally, we demonstrate the device's ability to interrogate specific biomolecular interactions, resulting in the first of its kind label-free biosensor.