Highly Sensitive $\beta{-}{\rm Ga}_{2}{\rm O}_{3}$ Nanowire Nanowires Isopropyl Alcohol Sensor

Abstract

We report the growth of β-Ga <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> O <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</sub> nanowires using a vapor phase transport method and the fabrication of β-Ga <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> O <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</sub> nanowire gas sensor. The β-Ga <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> O <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</sub> nanowire sensor shows reversible response to isopropyl alcohol (IPA) gas at temperature as low as 100 °C. With 300 ppm IPA gas introduced, it was found that measured responses were ~ 7.5%, 13.5%, and 23% when the sensor was operated at 100 °C, 200 °C, and 300 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">°</sup> C, respectively. It was also found that the responses measured at 300 °C were ~ 9%, 15.5%, 24%, and 33% when the injected IPA gas concentrations were 100, 200, 300, and 400 ppm, respectively.