Surface and Coatings Technology · 1991 · 14 citations · 0 references
Natural SciencesMaterials SciencePhysicsElectronic MaterialsPlasma PhysicsSurface EngineeringAccelerator PhysicsPlasma Surface TreatmentPlasma-surface InteractionsPlasma-wall InteractionsAcceleratorsCarbon CoatingsErosion MechanismsParticle Acceleration In PlasmasPlasma ErosionPlasma-assisted CoatingSputtering Processes