Fully etched apodized grating coupler on the SOI platform with −058  dB coupling efficiency

Yunhong Ding, Christophe Peucheret, Haiyan Ou, Kresten Yvind

Optics Letters · 2014 · 240 citations · 16 references

DOIFull text

Open access

Concepts

Abstract

We design and fabricate an ultrahigh coupling efficiency (CE) fully etched apodized grating coupler on the silicon-on-insulator (SOI) platform using subwavelength photonic crystals and bonded aluminum mirror. Fabrication error sensitivity and coupling angle dependence are experimentally investigated. A record ultrahigh CE of -0.58 dB with a 3 dB bandwidth of 71 nm and low back reflection are demonstrated.

References

16