Optics Letters · 2014 · 240 citations · 16 references
EngineeringElectrical EngineeringMaterials ScienceOptical MaterialsOptoelectronicsPhotonicsIntegrated OpticsIntegrated PhotonicsPhotonic CrystalsPhotonic Integrated CircuitsPhotonic MaterialsSilicon PhotonicsBandwidthBroadband Coupler DesignDevice FabricationError SensitivityGrating CouplersIntegrated Optics CouplingOptical CouplersWaveguide Coupling
We design and fabricate an ultrahigh coupling efficiency (CE) fully etched apodized grating coupler on the silicon-on-insulator (SOI) platform using subwavelength photonic crystals and bonded aluminum mirror. Fabrication error sensitivity and coupling angle dependence are experimentally investigated. A record ultrahigh CE of -0.58 dB with a 3 dB bandwidth of 71 nm and low back reflection are demonstrated.
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