Publication | Closed Access
Birefringence Induced by the Spatial Dispersion in Deep UV Lithography: Theory and Advanced Compensation Strategy
28
Citations
4
References
2005
Year
PhotonicsEngineeringPhysicsWave OpticOptical PropertiesDiffractive OpticApplied PhysicsDeep Uv LithographyAdvanced Compensation StrategyOptical SystemsOptoelectronicsSpatial Dispersion
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