Theoretical studies of defect-initiated particle emission from GaP(110) surfaces: Basis for a new technique of generating perfect surfaces

Abstract

We have calculated the energy needed to eject P atoms from several types of defects on the GaP (110) surface as well as from the perfect surface. It is found that most types of defects have a Ga or P atom bonded less strongly than those on the perfect surface. In view of the result of calculation, and of recent experimental observation that less strongly bonded atoms are ejected by irradiation with laser pulses of lower fluences, we suggest a new method of producing perfect surfaces using laser irradiation to eliminate steps and adatoms and deposition to eliminate vacancies.