Optimization of the sputtering process parameters of GZO films using the Grey–Taguchi method - Concepedia

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Optimization of the sputtering process parameters of GZO films using the Grey–Taguchi method

33

Citations

33

References

2009

Year

Chien‐Chih Chen, Chung‐Chen Tsao, Y.C. Lin, Chun‐Yao Hsu

Ceramics International

Materials ScienceEngineeringProcess ParametersGrey–taguchi MethodApplied PhysicsGzo Films

References

	Year	Citations

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