Concepedia

Publication | Closed Access

Properties and structure of silicon nitride films synthesized by ion-beam-enhanced deposition

DOI

13

Citations

5

References

1991

Year

Xianghuai Liu, Yuehui Yu, Zhihong Zheng, Wei Huang, Zou Shichang, Jin Zuqing, Ming Chang, Xu Shoulian, Shogo Taniguchi, T. Shibata,
Surface and Coatings Technology

References

YearCitations

Page 1