Field effect modulation of ionic conductance of cylindrical silicon-on-insulator nanopore array

Abstract

Results demonstrating the field effect modulation of ionic transport through an array of cylindrical nanopores fabricated in silicon-on-insulator substrates are presented. Pronounced modulation of the conductance is observed at low electrolyte concentrations when the electric double layers within the nanopores are overlapping. A numerical model based on Brownian dynamics reproduces the measured data.