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Evaluation of some mechanical properties of SiC films deposited on steel by plasma-assisted chemical vapour deposition from tetramethylsilane

Materials ScienceThermal Spray CoatingEngineeringMechanical PropertiesNanoelectronicsMechanical EngineeringApplied PhysicsSic FilmsThin FilmsPlasma ProcessingChemical Vapor DepositionThin Film ProcessingCarbide