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Positron Annihilation at Dislocations and Related Point Defects in Semiconductors
17
Citations
10
References
1999
Year
Materials ScienceSemiconductorsPoint DefectsEngineeringPhysicsDislocation InteractionPositron Annihilation SpectroscopyIntrinsic ImpurityApplied PhysicsCondensed Matter PhysicsDislocations ActSemiconductor MaterialDefect FormationRelated Point DefectsDefect ToleranceCombined Positron TrapsMicroelectronics
Dislocations act in semiconductors as combined positron traps, consisting of a shallow precursor state, which is related to regular parts of the dislocation line, and bound vacancy-like defects. The motion of dislocations during plastic deformation generates a high number of point defects. The clustering of vacancies to stable voids is regarded as a primary process of the jog dragging mechanism. Vacancy densities were quantitatively determined for different deformation conditions of GaAs.
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