Publication | Closed Access
Effect of high substrate bias and hydrogen and nitrogen incorporation on filtered cathodic vacuum arc deposited tetrahedral amorphous carbon films
39
Citations
42
References
2007
Year
Materials ScienceHigh Substrate BiasEngineeringSurface ScienceApplied PhysicsVacuum DeviceThin FilmsNitrogen IncorporationAmorphous SolidChemical Vapor DepositionThin Film ProcessingFiltered Cathodic Vacuum
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