Concepedia

Publication | Closed Access

In situ analysis of thin film deposition process using time of flight (TOF) ion beam analysis methods

DOI

19

Citations

12

References

1996

Year

Jaemo Im, A.R. Krauss, Yuping Lin, J. Schultz, Orlando Auciello, D. M. Gruen, Robert P. H. Chang
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

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