Material constants of new piezoelectric Ta2O5 thin films

Abstract

The first measurement of the material constants of Ta2O5 thin films is described. x-axis-oriented Ta2O5 thin films were deposited on fused quartz using the dc diode sputtering method. The material constants were determined from the phase velocity and the electromechanical coupling constant of the bulk waves and the surface acoustic waves propagating on the layered substrate.