Aluminum films prepared by metal-organic low pressure chemical vapor deposition

Chemically induced enhancement of nucleation in noble metal deposition

David L. Allara, A. F. Hebard, F. J. Padden et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1983 · 51 citations

Natural Sciences, Chemistry, Materials Science +14

Investigation of the thermal decomposition of triethylaluminium

William L. Smith, Thomas Wartik · Journal of Inorganic and Nuclear Chemistry · 1967 · 48 citations

Natural Sciences, Chemistry, Materials Science +12

Aluminum coatings by the decomposition of alkyls

Hugh O. Pierson · Thin Solid Films · 1977 · 36 citations

Natural Sciences, Materials Engineering, Materials Science +12

Production of aluminum and aluminum coatings by thermal decomposition of aluminum alkyls

A. Malazgirt, James W. Evans · Metallurgical Transactions B · 1980 · 26 citations

Engineering, Materials Engineering, Materials Science +16