Soft X-ray reflectometer with a laser-produced plasma source

Abstract

A soft X-ray reflectometer with a laser-produced plasma source driven by a Q-switched Nd: YAG laser or a XeCl excimer laser was constructed. By comparing the reflectances of a multilayer mirror with the data obtained using synchrotron radiation, its usefulness for reflectance measurements in the soft X-ray region (40-130 eV) is demonstrated.