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Changing the surface mechanical properties of silicon and α-Al2O3 by ion implantation

Materials ScienceIon ImplantationEngineeringCrystalline DefectsMechanical EngineeringApplied PhysicsSurface ScienceSurface EngineeringSemiconductor Device FabricationSurface Mechanical PropertiesSurface ProcessingSilicon On Insulator