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In situ measurements of sensor film dynamics by spectroscopic ellipsometry. Demonstration of back-side measurements and the etching of indium tin oxide

Materials ScienceBack-side MeasurementsSurface CharacterizationEngineeringSensorsSurface AnalysisSurface ScienceApplied PhysicsSpectroscopic EllipsometrySensor Film DynamicsThin Film Process TechnologyInstrumentationThin Film Processing