Plasma enhanced chemical vapor deposition of ZnO thin films - Concepedia

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Plasma enhanced chemical vapor deposition of ZnO thin films

25

Citations

15

References

2006

Year

P. K. Shishodia, H.J. Kim, Akihiro Wakahara, Akira Yoshida, G. Shishodia, R.M. Mehra

Journal of Non-Crystalline Solids

Materials ScienceEngineeringOxide ElectronicsApplied PhysicsThin FilmsChemical Vapor DepositionThin Film Processing

References

	Year	Citations

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