Vacuum · 2011 · 55 citations · 28 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSurface ScienceThin FilmsOptical Thin FilmsSemiconductor Thin FilmsThin Film Optical PropertiesThin Film Surface MorphologyThin-film DepositionThin-film MaterialsThickness ControlThickness-dependent Optical PropertiesThin Film Thickness Control
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