Analysis of structure and defects in thin silicon films deposited from hydrogen diluted silane - Concepedia

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Analysis of structure and defects in thin silicon films deposited from hydrogen diluted silane

28

Citations

19

References

2006

Year

Gijs van Elzakker, Vojtěch Nádaždy, F.D. Tichelaar, J.W. Metselaar, Miro Zeman

Thin Solid Films

Materials ScienceEngineeringSurface ScienceApplied PhysicsSemiconductor Device FabricationThin FilmsSilicon On InsulatorThin Silicon FilmsThin Film ProcessingSilicon Debugging

References

	Year	Citations

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