RF-PECVD deposition and optical properties of hydrogenated amorphous silicon carbide thin films - Concepedia

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RF-PECVD deposition and optical properties of hydrogenated amorphous silicon carbide thin films

30

Citations

26

References

2014

Year

Enlong Chen, Guoping Du, Yu Zhang, Xiaomei Qin, Hongmei Lai, Wangzhou Shi

Ceramics International

Materials ScienceOptical MaterialsEngineeringOptical PropertiesApplied PhysicsThin FilmsOptoelectronicsChemical Vapor DepositionThin Film ProcessingCarbideRf-pecvd Deposition

References

	Year	Citations

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